title
High-κ Metal Oxide Thin Film by Chemical Spray Pyrolysis: From Optimization of Material Properties to Application in Thin Film Transistor
Metallioksiidi õhukesed kiled keemilise pihustuspürolüüsi meetodil: materjali omaduste optimeerimine ja rakendamine õhukesekilelistes transistorides
author
Oluwabi, Abayomi Titilope
keywords
thin film processing
high-κ metal oxide
thin film transistor
chemical spray pyrolysis
zirconium oxide
UV-ozone treatment
dissertations
metallioksiidi õhukesed kiled
õhukesekilelised transistorid
keemilise pihustuspüroluusi meetod
tsirkooniumoksiid
utraviolett-osoon
serial number
Doctoral thesis 23/2020
Doktoritöö 23/2020
publisher
TalTech Press
TalTech Kirjastus
supervisor
Oja Acik, Ilona
Krunks, Malle
Mere, Arvo
defence date
19.08.2020
identifier
https://digikogu.taltech.ee/et/Item/4b6d9afd-74d2-40ac-9c12-335d2f608474
https://doi.org/10.23658/taltech.23/2020
ISBN 9789949835799 (pdf)
language
eng
rights
CC BY-NC-SA
institution
Tallinn University of Technology
Tallinna Tehnikaülikool
faculty
School of Engineering
Inseneriteaduskond
department / college
Department of Materials and Environmental Technology
Materjali- ja keskkonnatehnoloogia instituut