title
ALD meetodiga kasvatatud TiO2 kilede optilised ja struktuursed omadused
The Optical and Structural properties of TiO2 Thin-Films Grown with the ALD Method
author
Kumar, Liisa
keywords
aatomkihtsadestamine
Atomic layer deposition
titanium dioxide films
supervisor
defence date
language
subunit
Laboratory of Thin Film Energy Materials