title
Pihustuspürolüüsi meetodil sadestatud alumiiniumoksiidi õhukesed kiled elektroonikaseadistele
Spray deposited Aluminum oxide thin films for electronic applications
author
Omotosho, Khalil Dolapo
keywords
aluminum oxide
spray pyrolysis
dielectric
magistritööd
master's theses
supervisor
Oluwabi, Abayomi Titilope
Oja-Acik, Ilona
defence date
04.06.2019
language
eng
institution
Tallinna Tehnikaülikool
Tallinn University of Technology
faculty
Inseneriteaduskond
School of Engineering
department / college
Materjali- ja keskkonnatehnoloogia instituut
Department of Material and Environmental Technology