title
Alumiiniumnitriidil põhinevate raadiosageduslike mikroelektromehaaniliste lülitite parameetriline analüüs ja optimeerimine
Parametric Analysis and Optimization of AlN-Based RF MEMS Switches
author
Gyimah, Nafisat
keywords
RF MEMS switches
actuation voltage
contact force
eigen frequency
single beam
dual beam
defence date
language